Linear Guides for Semiconductor Equipment — Low-Dust and Cleanroom
Semiconductor tools need smooth motion with very little particle generation, and often need position feedback built into the axis. MGN miniature guides with suitable lubrication and wipers cover most handling axes; PG integrates the encoder into the rail.
What goes wrong on this axis
- Particle generation from grease and metal contact
- Position feedback that has to be integrated, not bolted on
- Very low tolerance for vibration and stick-slip
Recommended series
MGN miniature guide
Compact handling axes from 7 to 15 mm.
PG position-measuring guide
Magnetic encoder integrated in the rail to save space.
Q1 self-lubricating guide
Reduces grease migration on clean axes.
Models we quote most for this application
FAQ
| Do you supply cleanroom-compatible guides? | We supply low-dust configurations with suitable lubrication and wipers. Tell us the cleanliness class and the vacuum or atmospheric condition and we will confirm what we can support. |
| What resolution does the PG guide give? | Resolution depends on the encoder head paired with the rail. We quote the head and rail as a set so the resolution and interface match your controller. |
| Can the guide run without grease? | No guide runs truly dry. Self-lubricating series reduce the re-greasing interval; they still need the correct initial lubricant and wipers. |
Request a quote for this application
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